MF5000 Explosion-proof hydrogen nitrogen CO2 argon MEMS Gas Mass Flow Meter

 

Description MF5000 Explosion-proof hydrogen nitrogen CO2 argon MEMS Gas Mass Flow Meter
MF5000 series mass flow meters are specially designed for small pipe flow monitoring and control. The series can measure gas flow in a pipe diameter as small as 3 mm,but not over 19 mm. With the self-flow conditioning feature of the MEMS sensor package, the meters feature an extremely low pressure loss compared to the traditional by-pass thermal mass flow meters in this application scope. The accuracy of the meters are generally ±(1.5+0.2FS)% or better depending on the requests. The meters can work at an environment of -20 to 60 C and pressure up to 1.5 MPa. Applications include semiconductor gas process monitoring and control, hospital oxygen gas monitoring, etc.

Detailed image MF5000 Explosion-proof hydrogen nitrogen CO2 argon MEMS Gas Mass Flow Meter



Feature MF5000 Explosion-proof hydrogen nitrogen CO2 argon MEMS Gas Mass Flow Meter

Using microelectromechanical system chip processing technology and mass integrated circuit production technology and material growth technology,the size of sensor hu has been reduced to micron level, which greatly improves the sensitivity of the flowmeter.
Multi-sensor integration is implemented on a single chip, which greatly improves the range ratio of the flowmeter.
The zero point stability of the sensor is greatly improved compared with the traditional thermal mass flowmeter.
Combined with the microcomputer intelligent technology of secondary instrument, the flowmeter has good repeatability, and the measurement is accurate and reliable.
Technological advances have simplified the structure that has greatly reduced pressure loss and greatly reduced energy consumption compared with traditional mechanical instruments.
Using LCD to display instantaneous flow rate and accumulated flow rate, clear and intuitive, easy to see the data.
The product integrates electromagnetic compatibility design technology and has higher

 

Specification of MF5000 Explosion-proof hydrogen nitrogen CO2 argon MEMS Gas Mass Flow Meter

Accuracy: ±(1.5+0.5FS)%
Environment Temperature: -20 ~ +60 oC
Humidity: < 95 %RH (No icing or condensation)
Flow channel :3 ~ 19 mm
Display: Flowrate and accumulated flow
Interface:4 ~ 20 mA; RS485; Pulse
Calibration:Air @ 20 oC, 101.325 kPa
Protection: IP40 (Without Ex proof model); IP66 (With Ex proof model)
Ex Proof: Ex d IIC T4



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